Browse by Subject ultraviolet irradiation

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1

Low-Temperature Plasma Etching of Copper Films Using Ultraviolet Irradiation

Kang-Sik Choi; Chul-Hi Hanresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.37, no.11, pp.5945 - 5948, 1998-11

2

Reaction characteristics between Cu thin film and RF inductively coupled Cl-2 plasma without/with UV irradiation

Kwon, MS; Lee, JeongYongresearcher; Choi, KS; Han, CHresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.7, pp.4103 - 4108, 1998-07

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