Browse by Subject transition metal dichalcogenides (TMDs)

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Atomic Layer Etching Mechanism of MoS2 for Nanodevices

Kim, Ki Seok; Kim, Ki Hyun; Nam, Yeonsig; Jeon, Jaeho; Yim, Soonmin; Singh, Eric; Lee, Jin Yong; et al, ACS APPLIED MATERIALS & INTERFACES, v.9, no.13, pp.11967 - 11976, 2017-04

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