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Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01 |
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.3, pp.1409 - 1414, 2016-07 |
Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net Kim, JH; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07 |
공정모듈 작업시간의 변동이 있는 양팔 클러스터 장비의 스케줄링 = Scheduling of dual-armed cluster tools with process time variationlink 최우성; Choi, Woo-seong; et al, 한국과학기술원, 2010 |
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