Browse by Subject surface micromachining

Showing results 1 to 6 of 6

1
3-D construction of monolithic passive components for RF and microwave ICs using thick-metal surface micromachining technology

Yoon, Jun-Bo; Kim, BI; Choi, YS; Yoon, E, IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, v.51, no.1, pp.279 - 288, 2003-01

2
A closed-form approach for frequency tunable comb resonators with curved finger contour

Lee, Ki Bang; Lin, Liwei; Cho, Young-Ho, SENSORS AND ACTUATORS A-PHYSICAL, v.141, no.2, pp.523 - 529, 2008-02

3
CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs

Yoon, Jun-Bo; Choi, YS; Kim, BI; Eo, Y; Yoon, E, IEEE ELECTRON DEVICE LETTERS, v.23, no.10, pp.591 - 593, 2002-10

4
Dry release for surface micromachining with HF vapor-phase etching

Lee, Yong-Il; Park, Kyung-Ho; Lee, Jong Hyun; Lee, Chun Su; Yoo, Hyung Joun; Kim, Chang-Jin; Yoon, Yong-San, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.6, no.3, pp.226 - 233, 1997-09

5
Ku-band stop filter implemented on a high resistivity silicon with inverted microstrip line photonic bandgap (PBG) structure

Ha, ML; Kwon, Young Se, IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, v.15, no.6, pp.410 - 412, 2005

6
Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs

Park, KY; Lee, Chong-Won; Oh, YS; Cho, Young-Ho, SENSORS AND ACTUATORS A-PHYSICAL, v.64, no.1, pp.69 - 76, 1998-01

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