Showing results 1 to 1 of 1
Structure of SiO2 Films Grown at Low Temperature by Inductively Coupled Plasma Oxidation with Oxygen Gas Choi, Yong Woo; Ahn, Jin Hyung; Ahn, Byung Tae, ELECTRONIC MATERIALS LETTERS, v.1, no.2, pp.97 - 102, 2005-12 |
Discover