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Stacked Pt/SrBi2Ta2-xNbxO9/Pt/IrOx/Ir capacitor on poly plug Kweon, SY; Choi, Si-Kyung; Yang, WS; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.41, no.1, pp.66 - 69, 2002-01 |
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