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Effect of ion-beam assisted deposition on resistivity and crystallographic structure of Cr/Cu

Jung, Yang-Il; Lee, Jung-Suk; Park, Jeong-Yong; Jeong, Yong-Hwan; Moon, Kyoung Seok; Kim, Kyoung-Sun, ELECTRONIC MATERIALS LETTERS, v.5, no.3, pp.105 - 107, 2009

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