Browse by Subject e-beam patterning

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A directly patternable click-active polymer film via initiated chemical vapor deposition (iCVD)

Im, SungGapresearcher; Kim, Byeong-Su; Tenhaeff, Wyatt E.; Hammond, Paula T.; Gleason, Karen K., THIN SOLID FILMS, v.517, no.12, pp.3606 - 3611, 2009-04

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