Browse by Subject dual-servo stage

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A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage

Kim, Myeong-Hyeon; Jeong, Jae Heon; Kim, HyoYoung; Gweon, Dae-Gabresearcher, SMART MATERIALS AND STRUCTURES, v.24, no.10, 2015-10

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