Browse by Subject TiN-Si3N4-TiN

Showing results 1 to 1 of 1

1
TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor

Lee, Jae Woo; Jeon, J. H.; Kim, Y. G.; Lee, S. Q.; Yang, W. S.; Lee, Jungsoo; Lee, Sang-Gugresearcher, ELECTRONICS LETTERS, v.52, no.6, pp.468 - 469, 2016-03

Discover

Type

. next

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0