Browse by Subject TIN FILMS

Showing results 1 to 2 of 2

1
Kinetic Modeling of Film Growth Rate in Atomic Layer Deposition

Lim, J.; Park, H.; Sang-Won Kangresearcher, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.148, no.6, pp.C403 - C408, 2001-06

2
MOCVD of Titanium Nitride from a New Precursor Ti[N(CH3)C2H5]4

Shin, HK; Shin, HJ; Lee, JG; Kang, SWresearcher; Ahn, Byung Taeresearcher, CHEMISTRY OF MATERIALS, v.9, no.1, pp.76 - 80, 1997-01

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