Browse by Subject TIMED PETRI NETS

Showing results 1 to 3 of 3

1
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms

Tonke, Daniel; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04

2
Scheduling cluster tools for concurrent processing of two wafer types with PM sharing

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eogresearcher, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022, 2015-10

3
Scheduling Lot Switching Operations for Cluster Tools

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11

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