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Strain-controlled boron and nitrogen doping of amorphous carbon layers for hard mask applications Kim, TaeWan; Kim, Dongbin; Kim, Yong-Sung; Park, Hyun Sang; Lim, Sung Kyu; Park, Keun Oh.; Kim, Taesung; et al, DIAMOND AND RELATED MATERIALS, v.69, pp.102 - 107, 2016-10 |
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