Browse by Subject N-(tert-butyldimethylsilyloxy)maleimide

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Polymerization of N-(tert-butyldimethylsilyloxy)maleimide and applications of the polymers as resist materials

Kim, ST; Kim, Jin-Baekresearcher; Chung, CM; Ahn, KD, JOURNAL OF APPLIED POLYMER SCIENCE, v.66, no.13, pp.2507 - 2516, 1997

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