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ECR PECVD법을 이용한 SiOF 박막의 증착 특성 및 유전율 안정화에 관한 연구 = A study on the deposition characteristics and the dielectric stability of the SiOF films deposited by ECR PECVDlink 변경문; Byun, Kyung-Mun; et al, 한국과학기술원, 1999 |
Porous boron nitride/polyimide composite films with high thermal diffusivity and low dielectric properties via high internal phase Pickering emulsion method Yang, Kwansoo; Kang, Yi Young; Ahn, Hyun Jeong; Kim, Dong-Gyun; Park, No Kyun; Choi, Siyoung Q.; Won, Jong Chan; et al, JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY, v.82, pp.173 - 179, 2020-02 |
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