Browse by Subject IR ELECTRODES

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Improvement of morphological stability of PEALD-iridium thin films by adopting two-step annealing process

Kim, Sung-Wook; Kwon, Se-Hun; Jeong, Seong-Jun; Park, Jin-Seong; Kang, Sang-Wonresearcher, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.11, no.11, pp.H303 - H305, 2008-09

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