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Fabrication of Silicon-Oxide Thin Film by Using Ionized Physical Vapor Deposition and Application to Gate Insulators in Transparent Thin-Film Transistors

Cheong, Woo-Seok; Hwang, Chi-Sun; Shin, Jae-Heon; Park, Sang-Hee Koresearcher; Yoon, Sung-Min; Cho, Doo-Hee; Ryu, Minki; et al, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.54, no.1, pp.473 - 477, 2009-01

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