Browse by Subject ICPCVD

Showing results 1 to 1 of 1

1

Chemical bond structure of a-C:F films with a low dielectric constant deposited from CH4/CF4

gwon-sam kang; ho-jeong; chi-kyu choi; Chang, Choong-Seockresearcher, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.42, no.5, pp.676, 2003

Discover

Type

. next

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0