Browse by Subject ICP

Showing results 1 to 20 of 20

1
A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma

Park, Min; Chang, Hong-Youngresearcher; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon, THIN SOLID FILMS, v.518, pp.6694 - 6699, 2010-09

2
(A) study on oxidation of silicon by inductively coupled oxygen plasma and its application to polycrystalline silicon thin film transistors = 유도결합 산소플라즈마를 이용한 실리콘의 산화와 다결정실리콘박막트랜지스터에의 응용에 관한 연구link

Choi, Yong-Woo; 최용우; et al, 한국과학기술원, 1999

3
Analysis of transport phenomena in plasma enhanced chemical vapor deposition reactor = 플라즈마 강화 화학기상증착반응기에서의 전달 현상에 대한 해석link

Chung, Won-Young; 정원영; et al, 한국과학기술원, 1999

4
Characterization of a high-frequency inductively coupled plasma source

Lee, DS; Jun, HS; Chang, Hong-Youngresearcher, THIN SOLID FILMS, v.506, pp.469 - 473, 2006-05

5
DRIE 공정 변수에 따른 TSV 형성에 미치는 영향

김광석; 이영철; 안지혁; 송준엽; 유중돈researcher; 정승부, 대한금속·재료학회지, v.48, no.11, pp.1028 - 1034, 2010-11

6
Dry etching characteristics of Pb(ZrTi)O-3 films in CF4 and Cl-2/CF4 inductively coupled plasmas

Jung, JK; Lee, Won-Jongresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.3A, pp.1408 - 1419, 2001-03

7
Effect of Gas Composition on TiN Thin-Film Fabrication in N2/H2/Ar/TiCl4 Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition System

Jang, SS; Lee, Won-Jongresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS, v.40, no.8, pp.4819 - 4824, 2001-08

8
Effect of Process Parameters on TSV Formation Using Deep Reactive Ion Etching

Kim, Kwang-Seok; Lee, Young-Chul; Ahn, Jee-Hyuk; Song, Jun Yeob; Yoo, Choong D.researcher; Jung, Seung-Boo, KOREAN JOURNAL OF METALS AND MATERIALS, v.48, no.11, pp.1028 - 1034, 2010-11

9
Enhancement of adhesion strength of electroless-plated Ni under bump metallurgy by introduction of inductively coupled plasma enhanced bias sputtering Ni seed layer

Kim, ED; Lee, Won-Jongresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS EXPRESS LETTERS, v.44, no.50-52, pp.1541 - 1543, 2005-12

10
Etch-induced damage in single crystal Si trench etching by planar inductively coupled Cl-2/N-2 and Cl-2/HBr plasmas

Lee, JeongYongresearcher; Hwang, SW; Yeom, GY; Lee, JW; Lee, JY, THIN SOLID FILMS, v.341, no.1-2, pp.168 - 171, 1999-03

11
Interclass collision protection (ICP) model for IEEE 802.11e wireless LANs (WLANs) = IEEE 802.11e 무선랜에서 클래스간 충돌 방지 모형link

Cho, Woon-Sun; 조운선; et al, 한국과학기술원, 2007

12
LIF를 이용한 MICP에서의 이온가열 메카니즘 연구 = Study on ion heating mechanism in magnetized ICP with LIFlink

전상현; Jun, Sang-Hyun; et al, 한국과학기술원, 2006

13
Review of heating mechanism in inductively coupled plasma

Seo, SH; Chung, CW; Chang, Hong-Youngresearcher, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09

14
Sensor Fusion of Cameras and a Laser for City-Scale 3D Reconstruction

Bok, Yunsu; Choi, Dong-Geol; Kweon, In-Soresearcher, SENSORS, v.14, no.11, pp.20882 - 20909, 2014-11

15
Studies on characteristics of neutral and metastable neutral atom in high density argon plasmas by using laser induced fluorescence and scattering = 레이저 유도 형광 및 산란을 이용한 고밀도 아르곤 플라즈마에서의 중성종 및 준안정 중성종의 특성 연구link

Seo, Byong-Hoon; 서병훈; et al, 한국과학기술원, 2014

16
Study on electron heating and E-H mode transition in planar inductively coupled plasma = 평판형 유도결합 플라즈마에서 전자 가열 및 E-H 모드 전이에 관한 연구link

Seo, Sang-Hun; 서상훈; et al, 한국과학기술원, 2000

17
그리드전압을 이용한 전자온도제어 및 $CF_4/Ar$ 플라즈마에의 응용에 관한 연구 = Study on controlling electron temperature with grid bias and Its application to $CF_4/Ar$ plasmalink

홍정인; Hong, Jung-In; et al, 한국과학기술원, 1999

18
유도 결합 플라즈마를 이용한 HgCdTe 건식 식각에 관한 연구 = Study on HgCdTe dry etching using inductively coupled plasmalink

김태식; Kim, Tae-Sik; et al, 한국과학기술원, 1999

19
카메라와 3차원 레이저 레인지 파인더의 융합을 통한 개선된 ICP 알고리즘을 이용한 3차원 환경 복원 = 3D environment reconstruction using modified ICP algorithm by fusion of a camera and a 3D laser range finderlink

정지훈; Chung, Ji-Hoon; et al, 한국과학기술원, 2009

20
폴리머 분산 액정을 이용한 실리콘 태양전지의 표면 요철화 = Surface texturization of silicon solar cells using polymer dispersed liquid crystallink

임종산; Im, Jong-San; et al, 한국과학기술원, 2006

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