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Capacitive Electron Cooling in an Inductively Coupled Plasma Source/Capacitively Coupled Plasma Bias Reactor Jun, Hyun-Su; Lee, Dong-Seok; Chang, Hong-Young, JAPANESE JOURNAL OF APPLIED PHYSICS, v.52, no.10, 2013-10 |
Effects of carbon monoxide addition to chlorine plasma-treated platinum films Kim, JH; Woo, Seong-Ihl, APPLIED SURFACE SCIENCE, v.156, no.1-4, pp.9 - 15, 2000-02 |
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