Browse by Subject E-Beam Lithography

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Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride

Shim, Jae-Yeob; Baek, Kyu-Ha; Park, Kun-Sik; Shin, Hong-Sik; No, Kwang-Sooresearcher; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.10, pp.3628 - 3630, 2010-05

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