Browse by Subject DUV EXPOSURE

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Attenuated phase-shifting masks of chromium aluminum oxide

Kim, E; Hong, Daniel Seungbumresearcher; Lim, S; Kim, YB; Woo, SG; Kim, DW; No, Kwangsooresearcher, APPLIED OPTICS, v.37, no.19, pp.4254 - 4259, 1998-07

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