Browse by Subject 157nm lithography
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| 157 nm 광 리소그래피용 a-Si 박막과 Si-O-N 박막의 광학 특성 분석 = Optical properties of a-Si films and Si-O-N films for 157 nm optical lithographylink 김성관; Kim, Sung-Kwan; et al, 한국과학기술원, 2003 |
| Optical properties of thin amorphous silicon film on a phase shift mask for 157 nm lithography Kim, SungKwan; Kim, YangSoo; Choi, YoungMin; Choi, JongWan; Hong, Jongin; Shon, JungMin; Sung, Tae-Hyun; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, no.5A, pp.2523 - 2529, 2004-05 |
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