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Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08 |
The Impact of Processing Time Variations on Swap Sequence Performance in Dual-Armed Cluster Tools Lee, Jun-Ho; Kim, Hyun-Jung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.4, pp.2668 - 2677, 2023-10 |
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