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Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas Lee, J. B.; Chang, Hong-Young; Seo, S. H., PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.6, 2013-12 |
Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma Lee, Jeong-Beom; Seo, Sang-Hun; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6573 - 6577, 2010-09 |
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